[4f9d8] ^Download% Physics of Radiofrequency Capacitive Discharge - V P Savinov ~e.P.u.b! Online

[4f9d8] %Read~ Physics of Radiofrequency Capacitive Discharge - V P Savinov @PDF%

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial

Title : Physics of Radiofrequency Capacitive Discharge
Author : V P Savinov
Language : en
Rating :
4.90 out of 5 stars
Type : PDF, ePub, Kindle
Uploaded : Apr 15, 2021
Book code : 4f9d8

[4f9d8] Post Your Comments: